A Compact Electromagnetic Dual Actuation Positioning System with a 10 mm Range and Nanometer Resolution

In this manuscript, a compact electromagnetic dual actuation positioning system (CEDAPS) based on the Lorentz force principle that features 10 mm range and nanometer-scale resolution with flexure guides is presented. Firstly, stiffness of mechanism modelled. Secondly, it, primary coil designed, from its performance, suitable secondary made to compensate for deficiency subsystem. The characteristics forces generated by these coils are also evaluated an FEA simulation. Thirdly, control scheme presented combines performances two actuators, finally, prototype fabricated evaluate performance. results show nm (±5 mm) stroke low sub-micron sinusoidal tracking errors nanometer accuracy step under proposed scheme. thermal properties